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Plasma chemistry and diagnostic in an Ar–N 2 –H 2 microwave expanding plasma used for nitriding treatments

✍ Scribed by Touimi, S; Jauberteau, J L; Jauberteau, I; Aubreton, J

Book ID: 120518069
Publisher: Institute of Physics
Year: 2010
Tongue: English
Weight: 349 KB
Volume: 43
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/43/20/205203

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