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Plasma chemistry of an expanding Ar/C2H2 plasma used for fast deposition of a-C:H

✍ Scribed by van de Sanden, M.C.M; van Hest, M.F.A.M; de Graaf, A; Smets, A.H.M; Letourneur, K.G.Y; Boogaarts, M.G.H; Schram, D.C

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