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The properties of a-C:H films deposited by plasma decomposition of C2H2

✍ Scribed by Zou, J. W.; Schmidt, K.; Reichelt, K.; Dischler, B.

Book ID: 121820250
Publisher: American Institute of Physics
Year: 1990
Tongue: English
Weight: 923 KB
Volume: 67
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.345230

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