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Deposition of composite metal/C:H films — the basic properties of Ag/C:H

✍ Scribed by H Biederman; P Hlídek; J Pešička; D Slavínská; V Stundžia

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
600 KB
Volume
47
Category
Article
ISSN
0042-207X

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✍ H. Biederman; V. Stundžia; D. Slavı́nská; J. Glosı́k 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 216 KB

In this paper, plasma parameters of a DC unbalanced planar magnetron applied for Mo/C : H composite film deposition are described in connection with the basic film properties. Langmuir probe (of a V shape) heated to a dark red was used for »-A characteristic measurements in Ar and in a mixture of Ar