Study of an H 2 /CH 4 moderate pressure microwave plasma used for diamond deposition: modelling and IR tuneable diode laser diagnostic

✍ Scribed by Lombardi, G; Hassouni, K; Stancu, G D; Mechold, L; Röpcke, J; Gicquel, A

• Book ID: 121300979
• Publisher: Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 834 KB
• Volume: 14
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/14/3/005