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Mineral precursor for chemical vapor deposition of Rh metallic films

✍ Scribed by Pascal Doppelt; Valérie Weigel; Philippe Guinot

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 391 KB
Volume: 17
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(93)90096-6

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