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Microstructural characterizations and hardness evaluation of d.c. reactive magnetron sputtered CrN thin films on stainless steel substrate

✍ Scribed by Hetal N. Shah; Vipin Chawla; R. Jayaganthan; Davinder Kaur


Book ID
107582294
Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
701 KB
Volume
33
Category
Article
ISSN
0250-4707

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Piezoelectric Nb-doped Pb(Zr,Ti)O 3 thin films (PNZT) were deposited on stainless steel and silicon wafer substrates using RF-magnetron sputtering with the aim of micro-electromechanical systems (MEMS) applications. The obtained films on both kinds of substrates were strongly uniaxially oriented, fo