✦ LIBER ✦

Growth and characterization of 3C-SiC films on Si substrates by reactive magnetron sputtering; effects of CH4 partial pressure on the crystalline quality, structure and stoichiometry

✍ Scribed by Q. Wahab; L. Hultman; I.P. Ivanov; M. Willander; J.-E. Sundgren

No coin nor oath required. For personal study only.

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