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Composition and structure of epitaxial β-SiC films grown by reactive magnetron sputtering on Si(100) substrates

✍ Scribed by Q. Wahab; L. Hultman; J.-E. Sundgren; M. Willander


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
553 KB
Volume
11
Category
Article
ISSN
0921-5107

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