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Epitaxially grown β-SiC on Si(100) and Si(111) substrates by low pressure chemical vapour deposition

✍ Scribed by Wolfgang Just; Lucia Mühlhoff; Christoph Scholz; Thomas Weber


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
292 KB
Volume
11
Category
Article
ISSN
0921-5107

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