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Epitaxially grown β-SiC on Si in the CH4H2 system by hot filament chemical vapour deposition

✍ Scribed by Z. Sun; Y. Sun; X. Wang; Z. Zheng

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Epitaxially grown β-SiC on Si(100) and S

✍ Wolfgang Just; Lucia Mühlhoff; Christoph Scholz; Thomas Weber 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 292 KB