✦ LIBER ✦
Infrared kinetic study of ultrathin SiC buffer layers grown on Si(100) by reactive chemical vapour deposition
✍ Scribed by G. Ferro; Y. Monteil; H. Vincent; F. Cauwet; J. Bouix; P. Durupt; J. Olivier; R. Bisaro
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 687 KB
- Volume
- 278
- Category
- Article
- ISSN
- 0040-6090
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