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He/N2 reactive gas composition and the structural and electrical properties of InN thin films grown on A1N-nucleated (00.1) sapphire by planar magnetron sputtering

✍ Scribed by Wayne A Bryden; Scott A Ecelberger; Thomas J Kistenmacher


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
497 KB
Volume
247
Category
Article
ISSN
0040-6090

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