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Effects of oxygen partial pressure and substrate temperature on the structure and optical properties of MgxZn1−xO thin films prepared by magnetron sputtering

✍ Scribed by Xinghua Zhang; Zunming Lu; Fanbin Meng; Yongzhong Wang; Ying Li; Xiao Yu; Chengchun Tang


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
590 KB
Volume
257
Category
Article
ISSN
0169-4332

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ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph