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Structural and optical properties of MgxZn1−xO thin films deposited by magnetron sputtering

✍ Scribed by Xijian Zhang; Honglei Ma; Qingpu Wang; Jin Ma; Fujian Zong; Hongdi Xiao; Feng Ji; Shanjia Hou


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
232 KB
Volume
364
Category
Article
ISSN
0921-4526

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The NiO x thin films were deposited by reactive dc-magnetron sputtering from a nickel metal target in Ar + O 2 with the relative O 2 content 5%. The as-deposited NiO x thin films could represent a two-component system comprising crystalline NiO particles dispersed in an amorphous Ni 2 O 3 . Decompos