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Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering

โœ Scribed by T. Karasawa; Y. Miyata

Book ID
107864330
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
441 KB
Volume
223
Category
Article
ISSN
0040-6090

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Effect of substrate temperature on the e
Effect of substrate temperature on the electrical and optical properties of reactively evaporated indium tin oxide films
โœ N. Balasubramanian; A. Subrahmanyam ๐Ÿ“‚ Article ๐Ÿ“… 1988 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 175 KB

Electrical and optical properties of indium tin oxide films coated on soda-lime glass substrates have been investigated as a function of substrate temperature (~ = 250-450 ยฐC). Highly conducting (p-~8xlO -4 ยฃ2 cm) and transparent (T-~90%) films have been obtained at a substrate temperature of 350 ยฐC