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Hardness and structure characterization of films produced by reactive magnetron sputtering on a conventional austenitic stainless steel

✍ Scribed by Carlos M. Garzón; José E. Alfonso; Edna C. Corredor; Abel A. Recco; André P. Tschiptschin


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
195 KB
Volume
39
Category
Article
ISSN
0026-2692

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Piezoelectric Nb-doped Pb(Zr,Ti)O 3 thin films (PNZT) were deposited on stainless steel and silicon wafer substrates using RF-magnetron sputtering with the aim of micro-electromechanical systems (MEMS) applications. The obtained films on both kinds of substrates were strongly uniaxially oriented, fo