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Macrocrystalline silicon thin films prepared by RF reactive magnetron sputter deposition

✍ Scribed by MF Cerqueira; M Andritschky; L Rebouta; JA Ferreira; MF da Silva


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
748 KB
Volume
46
Category
Article
ISSN
0042-207X

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