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Thin films prepared by sputtering MgF2 in an rf planar magnetron

✍ Scribed by L. Martinů; H. Biederman; L. Holland

Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
547 KB
Volume
35
Category
Article
ISSN
0042-207X

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✍ Punnoose, A. ;Marafi, M. ;Prabu, G. ;El-Akkad, F. 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 162 KB 👁 2 views

CdS thin films were prepared using rf planar magnetron sputtering in Ar atmosphere. Different deposition temperatures between 150 and 250 C and different rf powers between 30 and 130 W were used. The films had hexagonal structure with crystallites oriented in the h100i direction. The increase of dep