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Study of annealed indium tin oxide films prepared by rf reactive magnetron sputtering

✍ Scribed by Li-jian Meng; A Maçarico; R Martins


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
813 KB
Volume
46
Category
Article
ISSN
0042-207X

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Polycrystalline Zn 3 N 2 films are prepared on Si and quartz glass substrates by RF magnetron sputtering at room temperature. The structural and optical properties are studied by X-ray diffraction and double beam spectrophotometer, respectively. X-ray diffraction indicates that the Zn 3 N 2 films de