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Kinetics of the formation of concentrational transitions between epitaxial layers of silicon in the process of growth from a molecular beam

✍ Scribed by M. I. Obsyannikov; R. G. Loginova; S. D. Tsarevskii


Book ID
112425975
Publisher
Springer
Year
1982
Tongue
English
Weight
242 KB
Volume
25
Category
Article
ISSN
1573-9228

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