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Studies of growth kinetics and polytypism of silicon carbide epitaxial layers grown from the vapour phase

✍ Scribed by Yu.M. Tairov; V.F. Tsvetkov; S.K. Lilov; G.K. Safaraliev

Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
404 KB
Volume
36
Category
Article
ISSN
0022-0248

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