Doping of silicon layers from a sublimating erbium source in molecular beam epitaxy

✍ Scribed by S. P. Svetlov; V. Yu. Chalkov; V. G. Shengurov; E. A. Uskova; G. A. Maksimov; B. A. Andreev; Z. F. Krasil’nik; M. V. Stepikhova; H. Ellmer

• Book ID: 110124216
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2000
• Tongue: English
• Weight: 45 KB
• Volume: 26
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/1.1262734