Simultaneous doping of silicon layers with erbium and oxygen in the course of molecular-beam epitaxy

✍ Scribed by V. G. Shengurov; S. P. Svetlov; V. Yu. Chalkov; G. A. Maksimov; Z. F. Krasil’nik; B. A. Andreev; M. V. Stepikhova; D. V. Shengurov; L. Palmetshofer; H. Ellmer

• Book ID: 110127708
• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 147 KB
• Volume: 35
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/1.1393027