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The Mechanism of Silicon Epitaxial Layer Growth from Ion-Molecular Beams

โœ Scribed by Aeksandrov, L. N. ;Ltovich, A. S. ;Blorusets, E. D.

Publisher
John Wiley and Sons
Year
1979
Tongue
English
Weight
798 KB
Volume
54
Category
Article
ISSN
0031-8965

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