✦ LIBER ✦

Investigations of ultrathin silicon nitride layers produced by low-energy ion implantation and EB-RTA

✍ Scribed by A. Markwitz; H. Baumann; W. Grill; A. Knop; E.F. Krimmel; K. Bethge

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Chemical bonding and interface analysis

✍ A. Markwitz; H. Baumann; E. F. Krimmel; R. W. Michelmann; C. Maurer; E. C. Palou 📂 Article 📅 1994 🏛 Springer 🌐 English ⚖ 443 KB

Anisotropic etchants inhibiting properti

✍ Gueorguiev, V. K. ;Popova, L. I. ;Petrov, I. N. ;Stoev, I. G. 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 321 KB

Depth profile analysis and study of the

✍ A. Markwitz; M. Arps; H. Baumann; E.F. Krimmel; K. Bethge 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 412 KB

Investigation of ultra thin SiNxOy layer

✍ R.W. Michelmann; H. Baumann; A. Markwitz; J.D. Meyer; K. Bethge 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 209 KB

Study of electronic properties and depth

✍ A. Markwitz; M. Arps; H. Baumann; G. Demortier; E.F. Krimmel; K. Bethge 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 887 KB

Nitrogen depth distribution, interface a

✍ Markwitz, Andreas ;Baumann, Horst ;Michelmann, Rolf W. ;Meyer, J�rg D. ;Krimmel, 📂 Article 📅 1997 🏛 Springer-Verlag ⚖ 631 KB