Investigation of ultra thin SiNxOy layers produced by low-energy ion implantation with NRA and channeling-RBS

✍ Scribed by R.W. Michelmann; H. Baumann; A. Markwitz; J.D. Meyer; K. Bethge

• Book ID: 113287102
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 209 KB
• Volume: 108
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(95)01047-5