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Study of electronic properties and depth profiles of buried and near-surface silicon nitride layers produced by ion implantation

✍ Scribed by A. Markwitz; M. Arps; H. Baumann; G. Demortier; E.F. Krimmel; K. Bethge

Book ID: 114169122
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 887 KB
Volume: 124
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(97)00095-5

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