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Depth profile analysis and study of the electronic properties of silicon nitride layers produced by ion implantation

✍ Scribed by A. Markwitz; M. Arps; H. Baumann; E.F. Krimmel; K. Bethge

Book ID: 113287360
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 412 KB
Volume: 113
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)01342-3

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