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Anisotropic etchants inhibiting properties of silicon-nitride compound layers produced by ion implantation

โœ Scribed by Gueorguiev, V. K. ;Popova, L. I. ;Petrov, I. N. ;Stoev, I. G.

Book ID
105379114
Publisher
John Wiley and Sons
Year
1986
Tongue
English
Weight
321 KB
Volume
94
Category
Article
ISSN
0031-8965

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