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Nitrogen depth distribution, interface and structure analysis of SiNx layers produced by low-energy ion implantation

✍ Scribed by Markwitz, Andreas ;Baumann, Horst ;Michelmann, Rolf W. ;Meyer, J�rg D. ;Krimmel, Eberhard F. ;Bethge, Klaus

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Chemical bonding and interface analysis

✍ A. Markwitz; H. Baumann; E. F. Krimmel; R. W. Michelmann; C. Maurer; E. C. Palou 📂 Article 📅 1994 🏛 Springer 🌐 English ⚖ 443 KB