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Investigation of RF power effect on the deposition and properties of PECVD TiSi2 thin film

โœ Scribed by Osama A Fouad; Masaaki Yamazato; Masamitsu Nagano

Book ID
108417810
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
410 KB
Volume
195
Category
Article
ISSN
0169-4332

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