✦ LIBER ✦

Effect of microwave power and reactive gas ratio on the properties of silicon nitride thin films deposited by ECR PECVD

✍ Scribed by Y. -C. Jeon; H. -Y. Lee; S. -K. Joo

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of substrate temperature on the p

✍ Cho, Shinho 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 608 KB

Investigation of RF power effect on the

✍ Osama A Fouad; Masaaki Yamazato; Masamitsu Nagano 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 410 KB

Effects of processing parameters on the

✍ J. Nazon; J. Sarradin; V. Flaud; J.C. Tedenac; N. Fréty 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 865 KB

The effect of diluent gas and rapid ther

✍ Chul Woo Nam; Seong Ihl Woo; Yong Tae Kim; Suk-Ki Min 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 621 KB

Influence of the target and working gas

✍ M. Vila; C. Prieto; J. Garcı́a-López; M.A. Respaldiza 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 665 KB

Effect of plasma source power on the nan

✍ Sun Gyu Choi; Hyung-Ho Park; Jin-Nyoung Jang; MunPyo Hong; Kwang-Ho Kwon 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 620 KB