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Influence of the target and working gas on the composition of silicon nitride thin films prepared by reactive RF-sputtering

✍ Scribed by M. Vila; C. Prieto; J. Garcı́a-López; M.A. Respaldiza


Book ID
114167466
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
665 KB
Volume
211
Category
Article
ISSN
0168-583X

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