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Influence of the sputtering gas composition on the properties of thin boron nitride thin films

✍ Scribed by Méndez, Juan Manuel; Ramı́rez, Efrén; Gaona-Couto, Adriana

Book ID: 122891386
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 214 KB
Volume: 7
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(98)00173-3

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