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Effects of time-dependent substrate biasing and gas composition on the nucleation of cubic boron nitride thin films

✍ Scribed by Nose, K.; Yang, H.S.; Kambara, M.; Yoshida, T.

Book ID: 123444854
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 929 KB
Volume: 19
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2010.07.006

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