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Effects of silicon incorporation on composition, structure and electric conductivity of cubic boron nitride thin films

✍ Scribed by Ying, J.; Zhang, X.W.; Fan, Y.M.; Tan, H.R.; Yin, Z.G.


Book ID
122780955
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
831 KB
Volume
19
Category
Article
ISSN
0925-9635

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