Influence of argon gas flow on mechanical and electrical properties of sputtered titanium nitride thin films

✍ Scribed by Kaykhosrow Khojier, Hadi Savaloni, Ebrahim Shokrai, Zohreh Dehghani, Naser Zare Dehnavi

• Book ID: 120961036
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 413 KB
• Volume: 7
• Category: Article
• ISSN: 2251-7235
• DOI: 10.1186/2251-7235-7-37