Study on structural, morphological and electrical properties of sputtered titanium nitride films under different argon gas flow

✍ Scribed by Nishat Arshi; Junqing Lu; Yun Kon Joo; Chan Gyu Lee; Jae Hong Yoon; Faheem Ahmed

• Book ID: 113784711
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 944 KB
• Volume: 134
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/j.matchemphys.2012.03.078