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Influence of nitrogen gas flow rate on the structural, morphological and electrical properties of sputtered TiN films

✍ Scribed by Nishat Arshi, Junqing Lu, Yun Kon Joo…


Book ID
120681360
Publisher
Springer US
Year
2012
Tongue
English
Weight
790 KB
Volume
24
Category
Article
ISSN
0957-4522

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