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Influence of the nitrogen partial pressure on the properties of d.c.-sputtered titanium and titanium nitride films

✍ Scribed by G. Lemperière; J.M. Poitevin

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 704 KB
Volume: 111
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(84)90326-2

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