The effect of target power on the nitrogen partial pressure level and hardness of reactively sputtered titanium nitride coatings

✍ Scribed by William D. Sproul; Paul J. Rudnik; Carl A. Gogol

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 591 KB
• Volume: 171
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(89)90042-4