✦ LIBER ✦

The influence of growth rate on the properties of anodic oxide films on titanium

✍ Scribed by D.J. Blackwood; L.M. Peter

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 639 KB
Volume: 34
Category: Article
ISSN: 0013-4686
DOI: 10.1016/0013-4686(89)87033-1

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✦ Synopsis

Impedance measurements and photocurrent spectroscopy have been used to examine the dependence on growth rate of the solid state properties of thin ( -c 20 nm) anodic oxide films on titanium. At room temperature, the relative permittivity and defect concentration profiles in the oxide were found to depend markedly on growth rate. The effects on the photocurrent of recombination and trapping were most pronounced when the tilms are grown rapidly. It was found that the high defect densities associated with rapidly grown oxide films could be decreased by growing or ann&xling the oxide films at higher temperatures.

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