Influence of RF power on the properties
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Antony, Aldrin ;Carreras, Paz ;Keitzl, Thomas ;RoldΓ‘n, RubΓ©n ;Nos, Oriol ;Friger
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Article
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2010
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John Wiley and Sons
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English
β 357 KB
## Abstract Transparent conducting, aluminium doped zinc oxide thin films (ZnO:Al) were deposited by radio frequency (RF) magnetron sputtering. The RF power was varied from 60 to 350βW whereas the substrate temperature was kept at 160βΒ°C. The structural, electrical and optical properties of the asβ