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Characteristics of ZnO:In thin films prepared by RF magnetron sputtering

✍ Scribed by L.P. Peng; L. Fang; X.F. Yang; H.B. Ruan; Y.J. Li; Q.L. Huang; C.Y. Kong


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
440 KB
Volume
41
Category
Article
ISSN
1386-9477

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CdS Thin Films Prepared by RF Magnetron
✍ Punnoose, A. ;Marafi, M. ;Prabu, G. ;El-Akkad, F. πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 162 KB πŸ‘ 2 views

CdS thin films were prepared using rf planar magnetron sputtering in Ar atmosphere. Different deposition temperatures between 150 and 250 C and different rf powers between 30 and 130 W were used. The films had hexagonal structure with crystallites oriented in the h100i direction. The increase of dep