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Effect of deposition temperature on dielectric properties of PECVD Ta2O5thin film

✍ Scribed by Hwan Seong Moon; Jae Suk Lee; Sung Wook Han; Jong Wan Park; Jae Hak Lee; Seung Kee Yang; Hyung Ho Park

Publisher: Springer
Year: 1994
Tongue: English
Weight: 493 KB
Volume: 29
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf00356687

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