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Dielectric properties of Ta2O5thin films deposited onto Ti and TiO2layer

✍ Scribed by In Sung Kim; Soon Jong Jeong; Jae Sung Song; Pan Seok Shin

Publisher: TechnoPress
Year: 2002
Tongue: English
Weight: 296 KB
Volume: 8
Category: Article
ISSN: 1598-9623
DOI: 10.1007/bf03178260

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