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Leakage currents in Ti−O/Ta2O5thin film deposited on Ta/Ti/Al2O3

✍ Scribed by Hyun-Ju Kim; Jae-Sung Song; In-Sung Kim; Sang-Su Kim


Publisher
TechnoPress
Year
2003
Tongue
English
Weight
184 KB
Volume
9
Category
Article
ISSN
1598-9623

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