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Off-axis excimer laser deposition of Ta2O5 thin films

✍ Scribed by Narumi Inoue; Shigeru Kashiwabara; Shigetada Toshima; Ryozo Fujimoto


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
254 KB
Volume
96-98
Category
Article
ISSN
0169-4332

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