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Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD

✍ Scribed by Jun Ding; Junying Hao; Qunji Xue; Weimin Liu

Book ID: 106393585
Publisher: Springer
Year: 2007
Tongue: English
Weight: 518 KB
Volume: 43
Category: Article
ISSN: 0022-2461
DOI: 10.1007/s10853-007-2149-x

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